- All sections
- C - Chemistry; metallurgy
- C23C - Coating metallic material; coating material with metallic material; surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 16/52 - Controlling or regulating the coating process
Patent holdings for IPC class C23C 16/52
Total number of patents in this class: 2754
10-year publication summary
290
|
245
|
240
|
226
|
268
|
221
|
277
|
357
|
306
|
117
|
2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
Owner |
All patents
|
This class
|
---|---|---|
Tokyo Electron Limited | 11599 |
389 |
Kokusai Electric Corporation | 1791 |
356 |
Applied Materials, Inc. | 16587 |
324 |
Lam Research Corporation | 4775 |
228 |
ASM IP Holding B.V. | 1715 |
168 |
Taiwan Semiconductor Manufacturing Company, Ltd. | 36809 |
65 |
Aixtron SE | 288 |
41 |
Samsung Electronics Co., Ltd. | 131630 |
30 |
Novellus Systems, Inc. | 559 |
24 |
NuFlare Technology, Inc. | 770 |
19 |
MKS Instruments, Inc. | 698 |
16 |
Fujikin Incorporated | 671 |
14 |
Samsung Display Co., Ltd. | 30585 |
13 |
Beneq Oy | 205 |
13 |
Jiangsu Favored Nanotechnology Co., LTD | 145 |
13 |
Jusung Engineering Co., Ltd. | 359 |
12 |
HORIBA STEC, Co., Ltd. | 302 |
11 |
Varian Semiconductor Equipment Associates, Inc. | 1282 |
10 |
Picosun Oy | 130 |
10 |
Sio2 Medical Products, Inc. | 199 |
10 |
Other owners | 988 |